Workpiece transfer system

ABSTRACT

The present application provides a workpiece transfer system in which a production efficiency of a production line to be used can be improved. For example, a workpiece transfer system  1  includes: robots  11  &amp;  12  placed in front of process modules  4  &amp;  6  for conducting a predetermined processing operation on a workpiece W, the robots  11  &amp;  12  bringing the workpiece W into the process modules  4  &amp;  6  and taking the workpiece W out of the process modules  4  &amp;  6 ; a workpiece storage unit  13  for storing the workpiece W to be brought into the process modules  4  &amp;  6  and the workpiece W taken out of the process modules  4  &amp;  6 ; and a transfer mechanism  14  for transferring the workpiece storage unit  13  in a direction almost perpendicular to a direction of bringing in and taking out the workpiece W for the process modules  4  &amp;  6.

CROSS REFERENCE TO RELATED APPLICATIONS

This is a U.S. national stage of International Application No.PCT/JP2012/080074, filed on Nov. 20, 2012. Priority is claimed to U.S.Provisional Application 61/563,183 filed Nov. 23, 2011, the disclosureof which is also incorporated herein by reference.

FIELD OF THE INVENTION

The present invention relates to a workpiece transfer system fortransferring a workpiece such as a semiconductor wafer, an LCD panel, asolar cell, and the like in a production line.

BACKGROUND

In a production line having a plurality of process modules that performa predetermined process for a workpiece, popularly used is an industrialrobot that transfers a workpiece among a plurality of process modules.For example, as shown in FIG. 6 and FIG. 7, an industrial robot 102(i.e., a robot 102) is used in a production line 101 for producingsemiconductors. The production line 101 includes an Equipment Front EndModule (EFEM), being not illustrated in the drawings; and for example,four process modules 103, 104, 105, and 106. The process module 103 andthe process module 104 are so placed as to be stacked in a verticaldirection, and meanwhile the process module 105 and the process module106 are so placed as to be stacked in a vertical direction. Moreover,the process modules 103 & 104 and the process modules 105 & 106 are soplaced as to have a predetermined space between their two groups, in adirection X of horizontal directions in FIG. 6 and FIG. 7. Between theprocess modules 103 & 104 and the EFEM, provided is a buffer 108 fortemporarily storing a semiconductor wafer W (a wafer W), as a workpiece,before supplying the wafer to the process modules 103 through 106.Incidentally, a wafer W stored in the EFEM is supplied to the buffer 108by a robot being not illustrated in the drawings.

The robot 102 is equipped with an end effector 111 for grasping a waferW. Concretely to describe, the robot 102 is equipped with two endeffectors 111; one is for receiving a wafer W from the buffer 108, andthe other is for placing a wafer W into the buffer 108. Furthermore, therobot 102 includes: an arm 112 to which the end effector 111 isconnected so as to be rotatable; an arm driving mechanism forelongating/contracting the arm 112 to move the end effector 111horizontally; a rotation mechanism for rotating the arm 112 around aroot-end side portion of the arm 112 while using a vertical direction asa shaft direction; a lifting mechanism 113 for lifting up and down theend effector 111; and a transfer mechanism 114 for transferring the endeffector 111 in the direction X. The robot 102 transfers the wafer Wbetween the buffer 108 and the process modules 103 through 106.

In the production line 101, though sometimes the wafer W after beingprocessed at one of the process modules 103 through 106 is subsequentlysupplied to another one of the process modules 103 through 106 forcompleting a predetermined process, the wafer W is usually returned tothe buffer 108. Then, at each of the process modules 103 through 106, apredetermined processing operation is conducted on the wafer W. Atfirst, in the production line 101, the robot 102 receives the wafer W,which has been supplied from the EFEM and stored in the buffer 108, fromthe buffer 108; and transfers the wafer W, for example, to the processmodules 103. Then, the robot 1 takes out the processed wafer W from theprocess modules 103, and transfers the processed wafer W again to thebuffer 108. Moreover, the robot 102 receives the wafer W from the buffer108, and transfers the wafer W, for example, to the process modules 105.By way of repeating these operations, the production line 101 executes apredetermined process for the wafer W. Namely, in the production line101, the predetermined process is executed for the wafer W with therobot 102 moving back and forth several times between the processmodules 103 through 106, where the wafer W is processed, and the buffer108.

Under conditions where a processed wafer W exists in the process modules103 through 106; for example, at the time when a wafer W is transferredto the process module 103, the robot 102 at the process module 103 takesout the processed wafer W, which has been processed in the processmodule 103, from the process module 103 by using one of the two endeffectors 111. At the same time, the robot 102 places a wafer W, whichhas been taken out from the buffer 108 and being grasped by the other ofthe two end effectors 111, into the process module 103. Subsequently,the robot 102 transfers the processed wafer W, which has been taken outfrom the process module 103 and being grasped by the said one of the twoend effectors 111, to the buffer 108. Moreover, at the buffer 108, therobot 102 takes out a wafer W, to be processed in the process module 105for example, from the buffer 108 by using the said other of the two endeffectors 111. At the same time, the robot 102 places the wafer W, whichhas been taken out from the process module 103 and being grasped by thesaid one of the two end effectors 111, into the buffer 108.

For materialization of the production line 101 being efficient, it isimportant to appropriately balance a performance of processing wafers Wby the process modules 103 through 106, a performance of transferringthe wafers W by the robot 102, and a layout of the process modules 103through 106, in the production line 101. Particularly in the case of theproduction line 101 in which the process modules 103 & 104 and theprocess modules 105 & 106 are so placed as to have a predetermined spacebetween their two groups, in the direction X, as shown in FIG. 6 andFIG. 7; for materialization of the production line 101 being efficient,it is important to improve efficiency of transferring the wafers W. Inother words, in the production line 101, for materialization of theproduction line 101 being efficient, it is important to increase atransfer speed of the robot 102 in the direction X.

In the meantime, unfortunately weight of a robot to be used generally ina production line for production of semiconductors and the like rangesfrom 50 to 100 kilograms, in accordance with a function in relation tothe robot. Therefore, when it is intended to safely operate the robot102 in the production line 101 for example, it is difficult to increasethe transfer speed of the robot 102 in the direction X in such a way asto be faster than a conventional speed. Accordingly, it is difficult toimprove a production efficiency of the production line 101, in such away as to make it better than a conventional efficiency.

Thus, at least an embodiment of the present invention provides aworkpiece transfer system in which a production efficiency of aproduction line to be used can be enhanced, and to provide a workpiecetransfer system in which a production efficiency of a production linecan be improved particularly when being used in a production line wherea workpiece such as a semiconductor and the like is transferred for arelatively long distance.

To bring a solution for the subject described above, a workpiecetransfer system according to at least an embodiment of the presentinvention includes; a robot placed in front of a process module forconducting a predetermined processing operation on a workpiece, therobot bringing the workpiece into the process module and taking theworkpiece out of the process module; a workpiece storage unit forstoring the workpiece to be brought into the process module and theworkpiece taken out of the process module; and a transfer mechanism fortransferring the workpiece storage unit in a direction almostperpendicular to a direction of bringing in and taking out the workpiecefor the process module.

The workpiece transfer system according to at least an embodiment of thepresent invention includes the workpiece storage unit for storing theworkpiece, and the transfer mechanism for transferring the workpiecestorage unit in the direction almost perpendicular to the direction ofbringing in and taking out the workpiece for the process module.Therefore, simply needed is to transfer the workpiece storage unitinstead of the robot, in the direction almost perpendicular to thedirection of bringing in and taking out the workpiece for the processmodule, wherein the workpiece storage unit being able to have a reducedlighter weight, compared to the robot. Accordingly, the workpiecestorage unit can safely be transferred even though a transfer speed ofthe workpiece storage unit is set to be higher than a transfer speed ofthe robot. In other words, efficiency of transferring the workpiece canbe improved by way of increasing the transfer speed of the wafer storageunit. As a result, production efficiency of the production line, inwhich the workpiece transfer system is used, can be improved.Furthermore, the transfer speed of the wafer storage unit can beincreased, and therefore if the workpiece transfer system according toat least an embodiment of the present invention is used in a productionline in which a workpiece is transferred for a comparatively longdistance, the production efficiency of the production line can befurther improved.

In at least an embodiment of the present invention, it is preferablethat the workpiece transfer system includes a plurality of robots laidout in the transfer direction of the workpiece storage unit and theworkpiece storage unit is able to store a plurality of workpieces.According to this configuration, for example, at an installation spot ofthe buffer 108 explained with reference to FIG. 6 and FIG. 7, aplurality of wafers can be stored in the workpiece storage unit.Therefore, in the case where this workpiece transfer system is used in aproduction line in which a plurality of process modules are placed inthe transfer direction of the workpiece storage unit; even though, afterone of the plurality of robots takes out a workpiece, the workpiecestorage unit moves directly to a installation spot of another of therobots without returning to the installation spot of the buffer, thelatter robot can take out a workpiece stored in the workpiece storageunit. Accordingly, the production efficiency of the production line, inwhich the workpiece transfer system is used, can effectively beimproved.

In at least an embodiment of the present invention, it is preferablethat the workpiece storage unit is placed between the process module andthe robot, in the direction of bringing in and taking out the workpiecefor the process module. According to this configuration, it is simplyneeded for an end effector of the robot to move from a specified standbyposition toward the workpiece storage unit, and further move in the samedirection as it has done, even after receiving a workpiece at theworkpiece storage unit in order to bring the workpiece into the processmodule. Moreover, the end effector that has moved from the processmodule toward the workpiece storage unit and stored the workpiece in theworkpiece storage unit simply needs to move in the same direction as ithas done, to the specified standby position. Therefore, control of therobot can be simplified.

In at least an embodiment of the present invention, it is preferablethat the workpiece transfer system includes: a plurality of workpiecestorage units placed so as to be stacked in a vertical direction, aplurality of transfer mechanisms for transferring each of the pluralityof workpiece storage units, and a plurality of robots, the number ofrobots being equal to or greater than the number of the plurality ofworkpiece storage units; wherein each of the robots includes; an endeffector on which the workpiece is mounted, and a lifting mechanism forlifting up and down the end effector; the plurality of robots are placedin a transfer direction of the workpiece storage units; the plurality ofworkpiece storage units are placed below the plurality of robots; and alower limit position of each moving range of the end effector providedto each of the plurality of robots is lowered in a stepwise manner inthe transfer direction of the workpiece storage units, and the lowerlimit position is set according to an elevation of each of the pluralityof workpiece storage units. According to this configuration, it ispossible to associate one of the plurality of workpiece storage unitswith one of the plurality of robots one-on-one. As a result, theworkpiece transfer system can be controlled easily. Furthermore,according to this configuration, a lower limit position of each movingrange of the end effector provided to each of the plurality of robots islowered in a stepwise manner in the transfer direction of the workpiecestorage units, and the lower limit position is set according to anelevation of each of the plurality of workpiece storage units; andtherefore, it becomes possible to prevent an interference of a robotassociated with a certain workpiece storage unit and any workpiecestorage unit other than the workpiece storage unit associated with therobot, by way of adjusting moving ranges of the plurality of workpiecestorage units. Then, it becomes possible to carry out operations of theplurality of robots and transfers of the plurality of workpiece storageunits at the same time freely. As a result, the production efficiency ofthe production line, in which the workpiece transfer system is used, caneffectively be improved.

In at least an embodiment of the present invention, it is preferablethat the workpiece storage units, being placed below the robots, movethrough an area away from a working space of the robots. According tothis configuration, it becomes possible to prevent an interference ofthe robots during operations and the workpiece storage units in motion.Then, it becomes possible to carry out operations of the robots andtransfers of the workpiece storage units at the same time freely. As aresult, the production efficiency of the production line, in which theworkpiece transfer system is used, can effectively be improved.Furthermore, according to this configuration, process modules can beplaced at both sides of the robots in a direction of bringing in andtaking out a workpiece.

As described above, at least an embodiment of the present inventionmakes it possible to improve a production efficiency of a productionline in which a workpiece transfer system is used.

BRIEF DESCRIPTION OF THE DRAWINGS

Embodiments will now be described, by way of example only, withreference to the accompanying drawings which are meant to be exemplary,not limiting, and wherein like elements are numbered alike in severalFigures, in which:

FIG. 1 is a plan view for explaining a configuration of a productionline in which a workpiece transfer system according to a firstembodiment of the present invention is used.

FIG. 2 is a side view for explaining the configuration of the productionline shown in FIG. 1.

FIG. 3 is a plan view for explaining a configuration of a productionline in which a workpiece transfer system according to a secondembodiment of the present invention is used.

FIG. 4 is a side view for explaining the configuration of the productionline shown in FIG. 3.

FIG. 5 is a drawing for explaining the configuration of the productionline, in a view of an E-E direction shown in FIG. 4.

FIG. 6 is a plan view for explaining a configuration of a productionline according to a conventional technology.

FIG. 7 is a side view for explaining the configuration of the productionline shown in FIG. 6.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

Embodiments of the present invention are described below with referenceto the accompanying drawings.

First Embodiment Configuration of Workpiece Transfer System

FIG. 1 is a plan view for explaining a configuration of a productionline 2 in which a workpiece transfer system 1 according to a firstembodiment of the present invention is used. FIG. 2 is a side view forexplaining the configuration of the production line 2 shown in FIG. 1.

The workpiece transfer system 1 according to the present embodiment is asystem for transferring a semiconductor wafer W (a wafer W), as aworkpiece, in the production line 2 for production of semiconductors. Inthe production line 2, several processing operations are sequentiallyconducted for the wafer W. The production line 2 includes an EFEM, beingnot illustrated in the drawings; and process modules 4 through 7 whichconduct a predetermined processing operation for the wafer W. Theproduction line 2 according to the present embodiment includes fourprocess modules 4 through 7. As a general rule, the process modules 4through 7 include a gate for taking the wafer W in and out (not shown).

The process module 4 and the process module 5 are so placed as to bestacked in a vertical direction, and meanwhile the process module 6 andthe process module 7 are so placed as to be stacked in a verticaldirection. Moreover, the process modules 4 & 5 and the process modules 6& 7 are so placed as to have a predetermined space between their twogroups, in a direction X that is one of horizontal directions. In thepresent embodiment, the process modules 4 & 5 are located closer to theEFEM than the process modules 6 & 7 are. Moreover, the process modules 4& 5 and the process modules 6 & 7 are placed at the same position in adirection Y that is one of the horizontal directions, wherein thedirection Y is perpendicular to the direction X. Furthermore, theprocess modules 4 and the process modules 6 are placed at the sameelevation, and meanwhile the process module 5 and the process module 7are placed at the same elevation.

The workpiece transfer system 1 includes: a robot 11 for bringing in awafer W to the process modules 4 & 5 and taking out a wafer W from theprocess modules 4 & 5; a robot 12 for bringing in a wafer W to theprocess modules 6 & 7 and taking out a wafer W from the process modules6 & 7; a wafer storage unit 13 as a workpiece storage unit, in whichwafers W to be brought into the process modules 4 through 7 as well aswafers W taken out from the process modules 4 through 7 are stored; anda transfer mechanism 14 for transferring the wafer storage unit 13 inthe direction X.

The robot 11 and the robot 12 are so-called SCARA (Selective ComplianceAssembly Robot Arm) robots. Each of the robot 11 and the robot 12 isequipped with two end effectors (hands) 16 for grasping a wafer W (orgetting a wafer W mounted). Furthermore, each of the robot 11 and therobot 12 includes: an arm 17 to which the end effector 16 is connectedso as to be rotatable; an arm driving mechanism forelongating/contracting the arm 17 to move the end effector 16; and alifting mechanism 18 for lifting up and down the end effector 16 and thearm 17. The robot 11 is placed in front of the process modules 4 and 5,and the robot 12 is placed in front of the process modules 6 and 7. Inthe present embodiment, the robot 11 is fixed at a position in front ofthe process modules 4 and 5, and the robot 12 is fixed at a position infront of the process modules 6 and 7. Furthermore, the robot 11 and therobot 12 are placed at the same position in the direction Y.

In the robot 11 and the robot 12, the lifting mechanism 18 lifts up anddown the end effector 16 in such a way that an elevation of the gate ofthe process modules 4 through 7 becomes the same as an elevation of theend effector 16. Moreover, in the robot 11 and the robot 12, the armdriving mechanism elongates/contracts the arm 17 so as to move the endeffector 16 linearly in the direction Y, in such a way as to bring awafer W into the process modules 4 through 7 and take out a wafer W fromthe process modules 4 through 7.

The wafer storage unit 13 is so shaped as to be, for example, like abox, in such a way as to become able to store wafers W. The waferstorage unit 13 is able to store a plurality of wafers W. In the presentembodiment, the wafer storage unit 13 is able to store two wafers W. Thewafer storage unit 13 is located between the process modules 4 through 7and the robots 11 & 12, in the direction Y. Furthermore, the waferstorage unit 13 is able to move in the direction X among an originposition (a position shown in FIG. 1 and FIG. 2) where a wafer W issupplied from the EFEM, the process modules 4 & 5, and the processmodules 6 & 7, in such a way that the wafer storage unit 13 transfers awafer W in the direction X among the origin position, the processmodules 4 & 5, and the process modules 6 & 7. Incidentally, a wafer Wstored in the EFEM is supplied to the wafer storage unit 13, located atthe origin position, by a robot that is not illustrated in the drawings.

For example, the transfer mechanism 14 includes a turning-type motor, alead screw that is connected to the turning-type motor and placed so asto have its longitudinal direction in the direction X, a nut componentthat is fixed to the wafer storage unit 13 and engaged with the leadscrew, a guide rail placed so as to have its longitudinal direction inthe direction X, and guide block that is fixed to the wafer storage unit13 and engaged with the guide rail. Alternatively, the transfermechanism 14 includes, for example, a linear motor and a timing belt,instead of the turning-type motor, the lead screw, and the nut componentthat are described above.

In the production line 2, though sometimes the wafer W after beingprocessed at one of the process modules 4 through 7 is subsequentlysupplied to another one of the process modules 4 through 7 forcompleting a predetermined process, the wafer W is usually returned tothe EFEM. Then, at each of the process modules 4 through 7, apredetermined processing operation is conducted on the wafer W. In thepresent embodiment; for example, when wafers W are brought into theprocess module 4 and the process module 6, two wafers are supplied atfirst in the production line 2 from the EFEM to the wafer storage unit13 being located at the origin position, and stored in the wafer storageunit 13; wherein one of the two wafers being a wafer W to be processedat the process module 4 and the other being a wafer W to be processed atthe process module 6. Incidentally, in the following explanation, it isassumed that the process module 4 and the process module 6 haveprocessed wafers W.

Subsequently, the wafer storage unit 13 transfers the stored wafers W toan installation spot of the robot 11 (namely, an installation spot ofthe process modules 4 & 5). After the wafers W are transferred to theinstallation spot of the robot 11, the robot 11 takes out the wafer Wprocessed at the process module 4 from the process module 4 by using oneof its two end effectors 16; and at the same time, the robot 11 takesout the wafer W from the wafer storage unit 13, and brings the wafer Winto the process module 4, by using the other of its two end effectors16. Moreover, the robot 11 places the wafer W, being grasped by the saidone of its end effectors 16 after having been taken out of the processmodule 4, onto the wafer storage unit 13.

Subsequently, the wafer storage unit 13 moves to an installation spot ofthe robot 12 (namely, an installation spot of the process modules 6 &7). Namely, the wafer storage unit 13 transfers the wafer W that hasbeen processed at the process module 4, and the wafer W that has beenstored at the origin position, to the installation spot of the robot 12.The robot 12 takes out the wafer W processed at the process module 6from the process module 6 by using one of its two end effectors 16; andat the same time, the robot 12 takes out the wafer W, stored at theorigin position, from the wafer storage unit 13, and brings the wafer Winto the process module 6, by using the other of its two end effectors16. Moreover, the robot 12 places the wafer W, being grasped by the saidone of its end effectors 16 after having been taken out of the processmodule 6, onto the wafer storage unit 13.

Subsequently, the wafer storage unit 13 moves to the origin position.Just after the wafer storage unit 13 moves to the origin position, twowafers W stored in the wafer storage unit 13 (namely, one wafer Wprocessed at the process module 4 and the other wafer W processed at theprocess module 6) are, for example, returned to the EFEM, by the robotthat is not illustrated in the drawings. Then, by way of repeating theseoperations, the production line 2 executes a predetermined process forthe wafer W.

Incidentally, after the wafer W taken out from the process module 4 andgrasped by one of the end effectors 16 is placed onto the wafer storageunit 13, as well as the wafer W is taken out from the wafer storage unit13 by using the other of the end effectors 16, the wafer storage unit 13may move from the installation spot of the robot 11 to the installationspot of the robot 12 at the same time as the robot 11 starts bringingthe wafer W grasped by the said other of the end effectors 16, into theprocess module 4. Furthermore, after the wafer W taken out from theprocess module 6 and grasped by one of the end effectors 16 is placedonto the wafer storage unit 13, as well as the wafer W is taken out fromthe wafer storage unit 13 by using the other of the end effectors 16,the wafer storage unit 13 may move from the installation spot of therobot 12 to the origin position at the same time as the robot 12 startsbringing the wafer W grasped by the said other of the end effectors 16,into the process module 6.

Primary Advantageous Effect of the Present Embodiment

As described above, the wafer storage unit 13 shaped like a box orequivalent is able to move in the direction X among the origin position,the process modules 4 & 5, and the process modules 6 & 7 in the presentembodiment. Therefore, in the present embodiment, for transferring thewafers in the direction X, it is simply needed to move the wafer storageunit 13 that can have a reduced lighter weight, being compared to therobot 11 and the robot 12, in the direction X. Accordingly, in thepresent embodiment, the wafer storage unit 13 can safely be moved, eventhough a moving speed of the wafer storage unit 13 is set to becomparatively higher. In other words, in the present embodiment,efficiency of transferring the wafers W can be improved by way ofincreasing the moving speed of the wafer storage unit 13. As a result,production efficiency of the production line 2 can be improved in thepresent embodiment. Furthermore, since the moving speed of the waferstorage unit 13 can be increased in the present embodiment, theproduction efficiency of the production line 2 can be further improvedin the case of a long transfer distance of wafers W in the productionline 2 (namely, either or both of a distance between the origin positionand the installation spot of the robot 11, and a distance between theinstallation spot of the robot 11 and the installation spot of the robot12, is long).

In the present embodiment, the workpiece transfer system 1 includes tworobots; i.e., the robot 11 and the robot 12, and meanwhile the waferstorage unit 13 is able to store two wafers W. Therefore, in the presentembodiment as described above, in the case where the wafer storage unit13 located at the origin position stores two wafers; for example, one ofthe wafers W to be processed at the process module 4 and the other ofthe wafers W to be processed at the process module 6, the robot 12 cancarries out a wafer W take-out operation and a wafer W bring-inoperation in relation to the process module 6, even though the waferstorage unit 13 moves to the installation spot of the robot 12, withoutonce returning to the origin position, after the robot 11 carries out awafer W take-out operation and a wafer W bring-in operation in relationto the process module 4.

Therefore, as shown in FIG. 1, wherein a distance between the originposition of the wafer storage unit 13 and the robot 11 (namely, adistance between the origin position of the wafer storage unit 13 andthe process modules 4 & 5) in the direction X is defined as “A”; and adistance between the robot 11 and the robot 12 (namely, a distancebetween the process modules 4 & 5 and the process modules 6 & 7) in thedirection X is defined as “B”; a travelling distance of the waferstorage unit 13 in an operation step with starting from the originposition, bringing the wafers W into the process module 4 and theprocess module 6, and subsequently returning to the origin position, inthe production line 2 of the present embodiment, is expressed as(2A+2B).

On the other hand, in the case of the conventional production line 101,for bringing wafers W into the process module 103 and the process module105 as described above, the robot 102 once returns to the buffer 108after bringing a wafer W into the process module 103, and then moves tothe process module 105 to bring a wafer W into the process module 105.Therefore, as shown in FIG. 6, wherein a distance between the buffer 108and the process modules 103 & 104 in the direction X is defined as “A”in a similar way; and a distance between the process modules 103 & 104and the process modules 105 & 106 in the direction X is defined as “B”in a similar way; a travelling distance of the robot 102 in an operationstep with starting from the buffer 108, bringing the wafers W into theprocess module 103 and the process module 105, and subsequentlyreturning to buffer 108, in the conventional production line 101, isexpressed as (4A+2B).

Namely, in the direction X, if the distance between the buffer 108 andthe process modules 103 & 104 is equal to the distance between theorigin position of the wafer storage unit 13 and the process modules 4 &5, and furthermore the distance between the process modules 103 & 104and the process modules 105 & 106 is equal to the distance between theprocess modules 4 & 5 and the process modules 6 & 7, the travellingdistance of the wafer storage unit 13 for bringing in the wafers W intothe process module 4 and the process module 6 is shorter by a distanceof 2A than the travelling distance for bringing in the wafers W into theprocess module 103 and the process module 105. Accordingly, beingcompared to the conventional production line 101, the production line 2according to the present embodiment can effectively improve theproduction efficiency.

In the present embodiment, the wafer storage unit 13 is located betweenthe process modules 4 through 7 and the robots 11 & 12, in the directionY that is a travelling direction of an end effector 16. Therefore, inthe present embodiment, it is simply needed for the end effector 16 tomove from a specified standby position toward the wafer storage unit 13,and further move in the same direction as it has done, even afterreceiving a wafer W at the wafer storage unit 13 in order to bring thewafer W into the process modules 4 through 7. Moreover, the end effector16 that has moved from the process modules 4 through 7 toward the waferstorage unit 13 and stored the wafer W in the wafer storage unit 13simply needs to move in the same direction as it has done, to thespecified standby position. Therefore, in the present embodiment, it isnot needed to provide a rotation mechanism for rotating the endeffectors 16 and the arms 17 around a root-end side portion of the arms17 while using a vertical direction as a shaft direction. As a result,in the present embodiment, configurations of the robot 11 and the robot12 can be simplified. Moreover, control of the robot 11 and the robot 12can be simplified.

In the present embodiment, the wafer storage unit 13 is able to move inthe direction X among the origin position, the process modules 4 & 5,and the process modules 6 & 7. Therefore, in the present embodiment, itis not needed to provide the robot 11 and the robot 12 with aconfiguration that move the end effectors 16 and the arms 17 in thedirection X. Accordingly, in the present embodiment, configurations ofthe robot 11 and the robot 12 can be simplified.

Modification Examples of the First Embodiment

In the first embodiment, the workpiece transfer system 1 is equippedwith a wafer storage unit 13, and a transfer mechanism 14 that move thewafer storage unit 13 in the direction X. Alternatively, for example,the workpiece transfer system 1 may include two wafer storage units; oneof the two wafer storage unit is an exclusive-use wafer storage unitthat transfers a wafer W supplied from the EFEM to the installation spotof the process modules 4 through 7, and the other of the two waferstorage unit is an exclusive-use wafer storage unit that transfers awafer W, processed at the process modules 4 through 7, from theinstallation spot of the process modules 4 through 7 to the EFEM; andtwo transfer mechanisms that individually transfer each of the two waferstorage units in the direction X. Further alternatively, the workpiecetransfer system 1 may include two wafer storage units; one of the twowafer storage units is an exclusive-use wafer storage unit thattransfers a wafer W between the EFEM and the installation spot of theprocess modules 4 & 5, and the other of the two wafer storage units isan exclusive-use wafer storage unit that transfers a wafer W between theEFEM and the installation spot of the process modules 6 & 7; and twotransfer mechanisms that individually transfer each of the two waferstorage units in the direction X. Further alternatively, the workpiecetransfer system 1 may include three or more wafer storage units andthree or more transfer mechanisms that individually transfer each of thethree or more wafer storage units in the direction X. In this case, theproduction efficiency of the production line 2 can be further improved.

In the first embodiment; two robots, namely the robot 11 and the robot12, are installed in the production line 2. Alternatively, for example,in the case where the production line 2 includes only the processmodules 4 & 5, it is simply needed for the production line 2 to includeonly one robot, namely the robot 11. In this case, the number of wafersW that the wafer storage unit 13 can store may be one. Furtheralternatively, the number of robots that are installed in the productionline 2 may be three or more, depending on a layout of process modules.

In the first embodiment, the robot 12 takes out a wafer W, which hasbeen stored at the origin position, from the wafer storage unit 13, andbrings the wafer W into the process module 6. Alternatively, forexample, the robot 12 may take out a wafer W, which has been processedat the process module 4, from the wafer storage unit 13, and brings thewafer W into the process module 6. Moreover, though the wafer storageunit 13 can store two wafers W in the first embodiment, the waferstorage unit 13 may be able to store three or more wafers W. In thiscase, for a further improvement of the production efficiency of theproduction line 2, it is preferable that the wafer storage unit 13 isable to store five or more wafers W.

Though the wafer storage unit 13 is placed between the process modules 4through 7 and the robots 11 and 12 in the direction Y in the firstembodiment, a location of the wafer storage unit 13 is not limited tothis position. For example, the wafer storage unit 13 may be placed insuch a way that the robots 11 and 12 are sandwiched between the processmodules 4 through 7 and the wafer storage unit 13 in the direction Y.Moreover, though one workpiece transfer system 1 is installed in theproduction line 2 in the first embodiment, two or more workpiecetransfer systems 1 may be installed in the production line 2.

Second Embodiment Configuration of Workpiece Transfer System

FIG. 3 is a plan view for explaining a configuration of a productionline 32 in which a workpiece transfer system 31 according to a secondembodiment of the present invention is used. FIG. 4 is a side view forexplaining the configuration of the production line 32 shown in FIG. 3.FIG. 5 is a drawing for explaining the configuration of the productionline 32, in a view of an E-E direction shown in FIG. 4.

The workpiece transfer system 31 according to the present embodiment isa system for transferring a semiconductor wafer W in the production line32 for production of semiconductors, as the workpiece transfer system 1of the first embodiment is. The production line 32 includes an EFEM 33and 16 process modules 34 through 49 which conduct a predeterminedprocessing operation for a wafer W. The process modules 34 through 49include a gate for taking the wafer W in and out (not shown).

The process module 34 and the process module 35 are so placed as to bestacked in a vertical direction, the process module 36 and the processmodule 37 are so placed as to be stacked in a vertical direction, theprocess module 38 and the process module 39 are so placed as to bestacked in a vertical direction, the process module 40 and the processmodule 41 are so placed as to be stacked in a vertical direction, theprocess module 42 and the process module 43 are so placed as to bestacked in a vertical direction, the process module 44 and the processmodule 45 are so placed as to be stacked in a vertical direction, theprocess module 46 and the process module 47 are so placed as to bestacked in a vertical direction, and then the process module 48 and theprocess module 49 are so placed as to be stacked in a verticaldirection.

Moreover, the process modules 34 & 35 and the process modules 36 & 37are placed at the same position in a direction X that is one ofhorizontal directions, and the process modules 34 & 35 and the processmodules 36 & 37 are so placed as to have a predetermined space betweentheir two groups, in a direction Y that is one of the horizontaldirections, wherein the direction Y is perpendicular to the direction X.The process modules 38 & 39 and the process modules 40 & 41 are placedat the same position in the direction X, and the process modules 38 & 39and the process modules 40 & 41 are so placed as to have a predeterminedspace between their two groups, in the direction Y. The process modules42 & 43 and the process modules 44 & 45 are placed at the same positionin the direction X, and the process modules 42 & 43 and the processmodules 44 & 45 are so placed as to have a predetermined space betweentheir two groups, in the direction Y. Then, the process modules 46 & 47and the process modules 48 & 49 are placed at the same position in thedirection X, and the process modules 46 & 47 and the process modules 48& 49 are so placed as to have a predetermined space between their twogroups, in the direction Y.

Moreover, the process modules 34 through 37, the process modules 38through 41, the process modules 42 through 45, and the process modules46 through 49 are placed at certain intervals in the direction X. Theprocess modules 34 through 37, the process modules 38 through 41, theprocess modules 42 through 45, and the process modules 46 through 49 areplaced in this order from a side of the EFEM 33 in the presentembodiment.

Furthermore, the process modules 34 & 35, the process modules 38 & 39,the process modules 42 & 43, and the process modules 46 & 47 are placedat the same position in a direction Y; and meanwhile, the processmodules 36 & 37, the process modules 40 & 41, the process modules 44 &45, and the process modules 48 & 49 are placed at the same position inthe direction Y. Moreover, the process module 34, the process module 36,the process module 38, the process module 40, the process module 42, theprocess module 44, the process module 46, the process module 48, areplaced at the same elevation; and meanwhile, the process module 35, theprocess module 37, the process module 39, the process module 41, theprocess module 43, the process module 45, the process module 47, theprocess module 49, are placed at the same elevation.

The workpiece transfer system 31 includes: a robot 51 for bringing inand taking out a wafer W with respect to the process modules 34 through37; a robot 52 for bringing in and taking out a wafer W with respect tothe process modules 38 through 41; a robot 53 for bringing in and takingout a wafer W with respect to the process modules 42 through 45; a robot54 for bringing in and taking out a wafer W with respect to the processmodules 46 through 49; a wafer storage unit 55 as a workpiece storageunit, in which wafers W to be brought in and taken out with respect tothe process modules 38 through 41 are stored; a wafer storage unit 56 asa workpiece storage unit, in which wafers W to be brought in and takenout with respect to the process modules 42 through 45 are stored; awafer storage unit 57 as a workpiece storage unit, in which wafers W tobe brought in and taken out with respect to the process modules 46through 49 are stored; a transfer mechanism 58 for transferring thewafer storage unit 55 in the direction X; a transfer mechanism 59 fortransferring the wafer storage unit 56 in the direction X; and atransfer mechanism 60 for transferring the wafer storage unit 57 in thedirection X. Incidentally, the robots 51 through 54 and the like are notillustrated in FIG. 5.

The robots 51 through 54 are so-called SCARA (Selective ComplianceAssembly Robot Arm) robots. Each of the robots 51 through 54 is equippedwith two end effectors (hands) 66 for grasping a wafer W (or getting awafer W mounted); two arms 67 to which the end effectors 66 areconnected so as to be rotatable; an arm driving mechanism forelongating/contracting the arms 67 to move the end effectors 66; arotation mechanism for rotating the arm 67 around a root-end sideportion of the arms 67 while using a vertical direction as a shaftdirection; and a lifting mechanism 68 for lifting up and down the endeffectors 66, the arms 67, and the rotation mechanism.

In the direction Y; the robot 51 is placed between the process modules34 & 35 and the process modules 36 & 37; the robot 52 is placed betweenthe process modules 38 & 39 and the process modules 40 & 41; the robot53 is placed between the process modules 42 & 43 and the process modules44 & 45; and the robot 54 is placed between the process modules 46 & 47and the process modules 48 & 49. Moreover, the robot 51 is placed infront of the process modules 34 through 37; the robot 52 is placed infront of the process modules 38 through 41; the robot 53 is placed infront of the process modules 42 through 45; and the robot 54 is placedin front of the process modules 46 through 49. In other words, therobots 51 through 54 are placed at certain intervals in the direction X.In the present embodiment, the robot 51 is fixed at a position in frontof the process modules 34 through 37; the robot 52 is fixed at aposition in front of the process modules 38 through 41; the robot 53 isfixed at a position in front of the process modules 42 through 45; andthe robot 54 is fixed at a position in front of the process modules 46through 49. Moreover, the robots 51 through 54 are placed at the sameposition in the direction Y.

Each of the wafer storage units 55 through 57 is so shaped as to be, forexample, like a box, in such a way as to become able to store wafers W.Each of the wafer storage units 55 through 57 is able to store aplurality of wafers W. Moreover, in each of the wafer storage units 55through 57, two wafers W are stored so as to be placed side by side inthe direction Y. The wafer storage units 55 through 57 are so placed asto be stacked in a vertical direction. More specifically to describe,the wafer storage units 55 through 57 are so placed as to be stacked inthis order from a top side. Moreover, the wafer storage units 55 through57 are placed below the robots 51 through 54 in a vertical direction.Furthermore, the wafer storage units 55 through 57 are placed at thesame position in the direction Y as the robots 51 through 54.

The wafer storage unit 55 is able to move in the direction X, from anorigin position (a position shown with a solid line in FIG. 4) where awafer W is supplied from the EFEM 33, to a position before the processmodules 38 through 41 in the direction X (a position shown with atwo-dot chain line in FIG. 3 and FIG. 4), and the wafer storage unit 55can pass under the robot 51. In other words, the wafer storage unit 55moves through an area away from working spaces of the robot 51, therobot 53, and the robot 54. The wafer storage unit 55 transfers a waferW in the direction X, between the position before the process modules 38through 41 in the direction X and the origin position.

The wafer storage unit 56 is able to move in the direction X, from anorigin position (a position shown with a solid line in FIG. 4) where awafer W is supplied from the EFEM 33, to a position before the processmodules 42 through 45 in the direction X (a position shown with atwo-dot chain line in FIG. 3 and FIG. 4), and the wafer storage unit 56is placed at a position that makes it possible to pass under the robot51 and the robot 52. In other words, the wafer storage unit 56 movesthrough an area away from working spaces of the robot 51, the robot 52,and the robot 54. The wafer storage unit 56 transfers a wafer W in thedirection X, between the position before the process modules 42 through45 in the direction X and the origin position.

The wafer storage unit 57 is able to move in the direction X, from anorigin position (a position shown with a solid line in FIG. 4) where awafer W is supplied from the EFEM 33, to a position before the processmodules 46 through 49 in the direction X (a position shown with atwo-dot chain line in FIG. 3 and FIG. 4), and the wafer storage unit 57is placed at a position that makes it possible to pass under the robots51 through 53. In other words, the wafer storage unit 57 moves throughan area away from working spaces of the robots 51 through 53. The waferstorage unit 57 transfers a wafer W in the direction X, between theposition before the process modules 46 through 49 in the direction X andthe origin position.

In the direction X, a buffer 70 is provided between the process modules34 through 37 and the EFEM 33. The buffer 70 is so shaped as to be, forexample, like a box, in such a way as to become able to store wafers W.The buffer 70 is able to store a plurality of wafers W. Moreover, in thebuffer 70, two wafers W are stored so as to be placed side by side inthe direction Y. The buffer 70 is fixed at a position above the waferstorage unit 55 being placed at the origin position. Furthermore, thewafer storage units 55 through 57 are stacked in the vertical directionwhen they are placed at the origin position. A wafer W stored in theEFEM 33 is supplied to the wafer storage units 55 through 57, beinglocated at the origin position, and the buffer 70, by a robot that isnot illustrated in the drawings.

In the same manner as the transfer mechanism 14 of the first embodiment,for example, each of the transfer mechanisms 58 through 60 includes aturning-type motor, a lead screw that is connected to the turning-typemotor and placed so as to have its longitudinal direction in thedirection X, a nut component that is fixed to each of the wafer storageunits 55 through 57 and engaged with the lead screw, a guide rail placedso as to have its longitudinal direction in the direction X, and a guideblock that is fixed to each of the wafer storage units 55 through 57 andengaged with the guide rail.

In the production line 32, the robot 51 takes out a wafer W, which hasbeen pretreated, from the buffer 70 and brings the wafer W into theprocess modules 34 through 37, and takes out a processed wafer W, whichhas been processed in the process modules 34 through 37, and then placesthe wafer W onto the buffer 70. The robot 52 takes out a wafer W, whichhas been pretreated, from the wafer storage unit 55 being stopped at aposition before the process modules 38 through 41 in the direction X,and brings the wafer W into the process modules 38 through 41, and takesout a processed wafer W, which has been processed in the process modules38 through 41, and then places the wafer W onto the wafer storage unit55 being stopped at the position before the process modules 38 through41 in the direction X. The robot 53 takes out a wafer W, which has beenpretreated, from the wafer storage unit 56 being stopped at a positionbefore the process modules 42 through 45 in the direction X, and bringsthe wafer W into the process modules 42 through 45, and takes out aprocessed wafer W, which has been processed in the process modules 42through 45, and then places the wafer W onto the wafer storage unit 56being stopped at the position before the process modules 42 through 45in the direction X. The robot 54 takes out a wafer W, which has beenpretreated, from the wafer storage unit 57 being stopped at a positionbefore the process modules 46 through 49 in the direction X, and bringsthe wafer W into the process modules 46 through 49, and takes out aprocessed wafer W, which has been processed in the process modules 46through 49, and then places the wafer W onto the wafer storage unit 57being stopped at the position before the process modules 46 through 49in the direction X.

In the robot 51, the lifting mechanism 68 lifts up and down the endeffector 66 in such a way that an elevation of a gate of the processmodules 34 through 37 becomes the same as an elevation of the endeffector 66. Moreover, in the robot 51, the arm driving mechanismelongates/contracts the arm 67 so as to move the end effector 66linearly, and meanwhile the arm 67 turns around its root-end sideportion, in such a way as to bring a wafer W out of the buffer 70 intothe process modules 34 through 37, and bring a wafer W out of theprocess modules 34 through 37 into the buffer 70. In the robot 51, alower limit position of a moving range of the end effector 66 is setaccording to an elevation of the buffer 70. Namely, in the robot 51, thelower limit position of the moving range of the end effector 66 isalmost the same as the elevation of the buffer 70. Therefore, asdescribed above, the wafer storage units 55 through 57 are able to passunder the robot 51.

In the robot 52, the lifting mechanism 68 lifts up and down the endeffector 66 in such a way that an elevation of a gate of the processmodules 38 through 41 becomes the same as an elevation of the endeffector 66. Moreover, in the robot 52, the arm driving mechanismelongates/contracts the arm 67 so as to move the end effector 66linearly, and meanwhile the arm 67 turns around its root-end sideportion, in such a way as to bring a wafer W out of the wafer storageunit 55 into the process modules 38 through 41, and bring a wafer W outof the process modules 38 through 41, into the wafer storage unit 55. Inthe robot 52, a lower limit position of a moving range of the endeffector 66 is set according to an elevation of the wafer storage unit55, so as to be almost the same as the elevation of the wafer storageunit 55. Therefore, as described above, the wafer storage units 56 and57 are able to pass under the robot 52.

In the robot 53, the lifting mechanism 68 lifts up and down the endeffector 66 in such a way that an elevation of a gate of the processmodules 42 through 45 becomes the same as an elevation of the endeffector 66. Moreover, in the robot 53, the arm driving mechanismelongates/contracts the arm 67 so as to move the end effector 66linearly, and meanwhile the arm 67 turns around its root-end sideportion, in such a way as to bring a wafer W out of the wafer storageunit 56 into the process modules 42 through 45, and bring a wafer W outof the process modules 42 through 45, into the wafer storage unit 56. Inthe robot 53, a lower limit position of a moving range of the endeffector 66 is set according to an elevation of the wafer storage unit56, so as to be almost the same as the elevation of the wafer storageunit 56. Therefore, as described above, the wafer storage unit 57 isable to pass under the robot 53.

In the robot 54, the lifting mechanism 68 lifts up and down the endeffector 66 in such a way that an elevation of a gate of the processmodules 46 through 49 becomes the same as an elevation of the endeffector 66. Moreover, in the robot 54, the arm driving mechanismelongates/contracts the arm 67 so as to move the end effector 66linearly, and meanwhile the arm 67 turns around its root-end sideportion, in such a way as to bring a wafer W out of the wafer storageunit 57 into the process modules 46 through 49, and bring a wafer W outof the process modules 46 through 49, into the wafer storage unit 57. Inthe robot 54, a lower limit position of a moving range of the endeffector 66 is set according to an elevation of the wafer storage unit57, so as to be almost the same as the elevation of the wafer storageunit 57.

Primary Advantageous Effect of the Present Embodiment

As described above, in the present embodiment, each of the wafer storageunits 55 through 57 shaped like a box or equivalent is able to move inthe direction X; and therefore, production efficiency of the productionline 32 can be improved, in the same manner as the production efficiencyof the first embodiment is.

Furthermore, in the present embodiment, the wafer storage unit 55 isable to move in the direction X, from the origin position to theposition before the process modules 38 through 41 in the direction X;the wafer storage unit 56 is able to move in the direction X, from theorigin position to the position before the process modules 42 through 45in the direction X; and the wafer storage unit 57 is able to move in thedirection X, from the origin position to the position before the processmodules 46 through 49 in the direction X. Moreover, in the robot 51, thelower limit position of the moving range of the end effector 66 is setaccording to the elevation of the buffer 70; in the robot 52, the lowerlimit position of the moving range of the end effector 66 is setaccording to the elevation of the wafer storage unit 55; in the robot53, the lower limit position of the moving range of the end effector 66is set according to the elevation of the wafer storage unit 56; and inthe robot 54, the lower limit position of the moving range of the endeffector 66 is set according to the elevation of the wafer storage unit57.

Therefore, in the present embodiment, it is possible to associate therobot 51 with the buffer 70 one-on-one, to associate the robot 52 withthe wafer storage unit 55 one-on-one, to associate the robot 53 with thewafer storage unit 56 one-on-one, and to associate the robot 54 with thewafer storage unit 57 one-on-one. As a result, the workpiece transfersystem 31 can be controlled easily in the present embodiment.

Moreover, in the present embodiment, while the wafer storage units 55through 57 being placed below the robots 51 through 54 in a verticaldirection; the wafer storage unit 55 moves through the area away fromthe working spaces of the robot 51, the robot 53, and the robot 54; thewafer storage unit 56 moves through the area away from the workingspaces of the robot 51, the robot 52, and the robot 54; and the waferstorage unit 57 moves through the area away from the working spaces ofthe robots 51 through 53. Therefore, in the present embodiment, itbecomes possible to prevent an interference of the robot 51 duringoperations and the wafer storage units 55 through 57 in motion; toprevent an interference of the robot 52 during operations and the waferstorage units 56 and 57 in motion; to prevent an interference of therobot 53 during operations and the wafer storage units 55 and 57 inmotion; and to prevent an interference of the robot 54 during operationsand the wafer storage units 55 and 56 in motion. Therefore, in thepresent embodiment, it becomes possible to carry out operations of therobots 51 through 54 and transfers of the wafer storage units 55 through57 at the same time freely. As a result, the production efficiency ofthe production line 32 can effectively be improved.

Modification Examples of the Second Embodiment

In the second embodiment, the lower limit position of the moving rangeof the end effector 66 of the robot 51, the lower limit position of themoving range of the end effector 66 of the robot 52, the lower limitposition of the moving range of the end effector 66 of the robot 53, andthe lower limit position of the moving range of the end effector 66 ofthe robot 54 are different one another. Alternatively, for example, thelower limit position of the moving range of the end effector 66 of therobot 52, the lower limit position of the moving range of the endeffector 66 of the robot 53, and the lower limit position of the movingrange of the end effector 66 of the robot 54 may be the same as thelower limit position of the moving range of the end effector 66 of therobot 51. In this case, needed are installing a lifting mechanism forlifting the wafer storage unit 55 up to the lower limit position of themoving range of the end effector 66 of the robot 52, between the robot51 and the robot 52; installing a lifting mechanism for lifting thewafer storage unit 56 up to the lower limit position of the moving rangeof the end effector 66 of the robot 53, between the robot 52 and therobot 53; and installing a lifting mechanism for lifting the waferstorage unit 57 up to the lower limit position of the moving range ofthe end effector 66 of the robot 54, between the robot 53 and the robot54. Accordingly in this case, it becomes possible to prevent aninterference of the robots 51 through 54 during operations and the waferstorage units 55 through 57 in motion. Then, it becomes possible tocarry out operations of the robots 51 through 54 and transfers of thewafer storage units 55 through 57 at the same time freely. As a result,the production efficiency of the production line 32 can effectively beimproved.

In the second embodiment, the wafer storage units 55 through 57 areplaced at the same position in the direction Y as the robots 51 through54. Alternatively, for example, the wafer storage units 55 through 57may be located at a position displaced from the position of the robots51 through 54 in the direction Y. Moreover, though the wafer storageunits 55 through 57 are so placed as to be stacked in a verticaldirection in the second embodiment, the wafer storage units 55 through57 may be located at positions displaced one another in the direction Y.Furthermore, wafer storage units may be so located at both sides in thedirection Y as to sandwich the robots 51 through 54.

In the second embodiment, the buffer 70 is provided between the processmodules 34 through 37 and the EFEM 33. Alternatively, for example, awafer storage unit movable in the direction X may be provided instead ofthe buffer 70, in the case where a distance between the process modules34 through 37 and the EFEM 33 is long in the direction X.

Other Embodiments

The embodiment described above is an example of a preferred embodimentaccording to the present invention, and an embodiment of the presentinvention is not limited to the above embodiment, and various variationscan be made without changing the concept of the present invention.

The workpiece to be transferred in the workpiece transfer system 1 andthe workpiece transfer system 31 is a wafer W in the embodimentsdescribed above. Alternatively, for example, another type of workpiecesuch as an LCD panel or a solar battery panel, and the like, instead ofthe wafer W, may be transferred in the workpiece transfer system 1 andthe workpiece transfer system 31.

While the description above refers to particular embodiments of thepresent invention, it will be understood that many modifications may bemade without departing from the spirit thereof. The accompanying claimsare intended to cover such modifications as would fall within the truescope and spirit of the present invention.

The presently disclosed embodiments are therefore to be considered inall respects as illustrative and not restrictive, the scope of theinvention being indicated by the appended claims, rather than theforegoing description, and all changes which come within the meaning andrange of equivalency of the claims are therefore intended to be embracedtherein.

1. A workpiece transfer system for use with a workpiece and a pluralityof process modules structured to perform a predetermined processing onthe workpiece, the workpiece transfer system comprising: a plurality ofrobots placed in front of the plurality of process modules, each robotof the plurality of robots bringing the workpiece into one of theplurality of process modules and taking the workpiece out of the processmodule; a workpiece storage unit for storing the workpiece to be broughtinto the process module and the workpiece taken out of the processmodule; and a transfer mechanism for transferring the workpiece storageunit in a direction almost perpendicular to a direction of bringing inand taking out the workpiece for the process module, wherein theplurality of robots is laid out in the transfer direction of theworkpiece storage unit, wherein the workpiece storage unit is structuredto store a plurality of said workpieces. wherein the plurality ofprocess modules comprises a first group placed so as to be stacked in avertical direction, and a second group of process modules placed so asto be stacked in a vertical direction, wherein a predetermined space isprovided between the first group and the second group; wherein each ofthe robots comprises: an end effector on which the workpiece is mounted,and a lifting mechanism for lifting up and down the end effector. 2.(canceled)
 3. The workpiece transfer system according to claim 1,wherein the workpiece storage unit is placed between the process moduleand the robot, in the direction of bringing in and taking out theworkpiece for the process module.
 4. (canceled)
 5. The workpiecetransfer system according to claim 1, wherein being placed below therobots, the workpiece storage units move through an area away from aworking space of the robots.
 6. The workpiece transfer system accordingto claim 3, wherein being placed below the robots, the workpiece storageunits move through an area away from a working space of the robots.